NA-CS1 Nonionic photoacid generator Photocationic polymerization initiator Arylamide skeleton

Sulfonium Series

CPI®-100 / 200series UV
UV light / i-line

CPI-100P(liquid)
CPI-110P(powder)
CPI-100B(40)(liquid)
CPI-110B(powder)
CPI-101A(liquid)
CPI-200K(liquid)
CPI-210S(powder)
cation
(light-absorbing site)

CPI®-300series
i-line

CPI-310FG(powder)
CPI-310B(powder)
cation
(light-absorbing site)

VC-1 VC-2 Series (development product)
i-line

VC-1FG(powder)
cation
(light-absorbing site)

CPI®-400series
g-line / h-line/ i-line

CPI-410S(powder)
CPI-410B(powder)
cation
(light-absorbing site)

ES-1 (development product)
ES-2 (development product)
g-line / h-line/ i-line

ES-1B(powder)
ES-2B(powder)
cation
(light-absorbing site)

Photoacid Generator(Iodonium)
IK Series

IK-1(powder)
IK-1FG(powder)
cation
(light-absorbing site)

IK-20B(powder)
cation
(light-absorbing site)

Nonionic Photoacid Generator

NAseries
(development product)
i-line compatible

NA-CS1(powder)
Aryl amide skeleton with
a light-absorbing moiety

Thermal acid generator

Thermal acid generator(Overview and Function Map)

TA Series(Sulfonium Salt Type)

TA-100(powder)
TA-100FG(powder)
cation

IKseries(Iodonium Salt Type)

IK-1(powder)
IK-1FG(powder)
cation

AAseries(Ammonium Salt-Type)

AA-01(powder)
cation

IK-20B(powder)
cation

Thermal Base Generators

DBU Salt Thermal Base Generators

DBU Salt

U-CAT SA 1(liquid)
U-CAT SA 102(liquid～solid)
U-CAT SA 603(solid)
U-CAT SA 810(solid)
U-CAT SA 506(liquid～solid)

Ammonium Salts

U-CAT 18X(liquid～solid)

NA-CS1Nonionic photoacid generator Photocationic polymerization initiator Arylamide skeleton

Characteristics and Applications

NA-CS1 is a non-ionic type photoacid generator with high sensitivity to i-line, a special grade available only from us. It generates bulky camphorsulfonic acid, making it possible to suppress acid diffusion (e.g., improve pattern rectangularity). It also has excellent resistance to strong amines such as triethylamine and thermal stability.
NA-CS1 is a solvent-free powder product.

Regarding absorbed wavelengths

The i-line (365nm) has an absorption of about 400 [M-1cm-1] in molar absorption coefficient.There is no absorption in the h-line (405 nm) or g-line (436 nm).”
Solubility

It dissolves about 25 wt% in PGMEA and about 35 wt% in γ-butyrolactone.
Resistance to Amines

It is highly stable even in the presence of pyridine or triethylamine.
Regarding different types of acids generated

We have mainly developped alkyl sulfonic acids and aryl sulfonic acids. Please feel free to contact us.
Recommended amount of additive

Add about 0.5 to 3 wt% to the resin, depending on the application and film thickness.
Recommended film thickness

It has a low molar extinction coefficient at 365 nm and high permeability, making it suitable for use on thick films (50 μm and above).Of course, it can also be used with a thin film.

Product

Anion	non-PFAS	CAS RN®	M.W.	Appearance	Color	Solution product	High sensitivity for i-line	High sensitivity for g,h-line	Low coloration	High solubility	High Activity（Strong acid）	Low metal corrosiveness	Packing	Stage
camphasulfonic acid	✔	Yes (not disclosed)	Approx.500	Powder	White ~ Light brown							✔	0.5kgBottle	Pilot

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In recent years, there has been a worldwide tightening of regulations on per- and polyfluoroalkyl substances (PFAS), and we are focusing on the development of PFAS-free products to ensure that our customers can use them with peace of mind. Please also make use of our existing lineup of PFAS-free products.

*PFAS: OECD definition published in2021